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Fabrication of integrated optic fibre tip for micron CMMs touch trigger probe application

conference contribution
posted on 2005-01-01, 00:00 authored by H Ji, H Hsu, J Chua, Lingxue KongLingxue Kong, A Wedding, Fenghua SheFenghua She, G Lin, K Fan
Fabrication of integrated optic fibre tip for micron CMMs touch trigger probe application

History

Event

Society of Photo-optical Instrumentation Engineers (2005 : Brisbane, Queensland)

Publisher

SPIE

Location

Brisbane, Queensland

Place of publication

[Brisbane, Qld.]

Start date

2005-12-11

End date

2005-12-15

Language

eng

Publication classification

E1.1 Full written paper - refereed

Editor/Contributor(s)

A Hariz

Title of proceedings

SPIE 2005 : Proceedings of the 2005 Society of Photo-optical Instrumentation Engineers, International symposium on Microelectronics, MEMS and Nanotechnology

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