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Development of a contact probe incorporating a bragg grating strain sensor for nano coordinate measuring machines
journal contribution
posted on 2009-09-01, 00:00 authored by H Ji, H Y Hsu, Lingxue KongLingxue Kong, A WeddingThis paper presents a novel optical fibre based micro contact probe system with high sensitivity and repeatability. In this optical fibre probe with a fused spherical tip, a fibre Bragg grating has been utilized as a strain sensor in the probe stem. When the probe tip contacts the surface of the part, a strain will be induced along the probe stem and will produce a Bragg wavelength shift. The contact signal can be issued once the wavelength shift signal is produced and demodulated. With the fibre grating sensor element integrated into the probe directly, the probe system shows a high sensitivity. In this work, the strain distributions along the probe stem with the probe under axial and lateral load are analysed. A simulation of the strain distribution was performed using the finite element package ANSYS 11. Performance tests using a piezoelectric transducer stage with a displacement resolution of 1.5 nm yielded a measurement resolution of 60 nm under axial loading.
History
Journal
Measurement science and technologyVolume
20Issue
9Pagination
1 - 7Publisher
Institute of Physics Publishing Ltd.Location
Bristol, EnglandPublisher DOI
ISSN
0957-0233eISSN
1361-6501Language
engPublication classification
C1 Refereed article in a scholarly journal; C Journal articleCopyright notice
2009, IOP Publishing LtdUsage metrics
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