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Development of a novel micro-spray-assembly process for multilayer ultra-thin film formation
A novel micro-spray-assembly process and an automatic device to fabricate multilayer ultra-thin film are introduced. Employing self-assembly monolayer (SAM) technique, ultra-thin film can be assembled by utilizing the micro-spray-assembly device. The thickness and roughness of each monolayer can be controlled by varying various materials attributes, i.e., deposition time, ionic strength, pH value, molecular concentration and by selecting different manufacturing parameters of the automatic device such as spraying rate, size of micro-drop, N2 flow rate, temperature of N2 flow.
History
Journal
Journal of metastable and nanocrystalline materialsVolume
23Season
Science and Technology of NanomaterialsPagination
331 - 334Publisher
Trans TechLocation
Stafa-Zurich, SwitzerlandISSN
1422-6375Language
engPublication classification
C1.1 Refereed article in a scholarly journalCopyright notice
2005, Trans Tech Publications Ltd,Usage metrics
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