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Fabrication of a glass-impolemented microcapillary electrophoresis device with integrated contactless conductivity detection
journal contribution
posted on 2002-10-01, 00:00 authored by A Berthold, F Laugere, H Schellevis, C R De Boer, M Laros, Rosanne GuijtRosanne Guijt, P M Sarro, M J VellekoopGlass microdevices for capillary electrophoresis (CE) gained a lot of interest in the development of micrototal analysis systems (μTAS). The fabrication of a μJAS requires integration of sampling, chemical separation and detection systems into a microdevice. The integration of a detection system into a microchannel, however, is hampered by the lack of suitable microfabrication technology. Here, a microfabrication method for integration of insulated microelectrodes inside a leakage-free microchannel in glass is presented. A combination of newly developed technological approaches, such as low-temperature glass-to-glass anodic bonding, channel etching, fabrication of buried metal interconnects, and deposition of thin plasma-enhanced chemical vapour deposition (PECVD) silicon carbide layers, enables the fabrication of a CE microdevice with an integrated contactless conductivity detector. The fabrication method of this CE microdevice with integrated contactless conductivity detector is described in detail. Standard CE separations of three inorganic cations in concentrations down to 5 μm show the viability of the new μCE system.
History
Journal
ElectrophoresisVolume
23Issue
20Pagination
3511 - 3519Publisher
WileyLocation
Weinheim, GermanyISSN
0173-0835Language
engPublication classification
C1.1 Refereed article in a scholarly journalCopyright notice
2002, WILEY-VCH Verlag GmbH & Co. KGaA, WeinheimUsage metrics
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