File(s) under permanent embargo
Nanoscale coating on tip geometry by cryogenic focused ion beam deposition
journal contribution
posted on 2021-10-01, 00:00 authored by S Zhang, G Gervinskas, Y Liu, Ross MarceauRoss Marceau, J FuNanoscale coating on tip geometry by cryogenic focused ion beam deposition
History
Journal
Applied Surface ScienceVolume
564Article number
150355Pagination
1 - 7Publisher
ElsevierLocation
Amsterdam, The NetherlandsPublisher DOI
ISSN
0169-4332eISSN
1873-5584Language
engPublication classification
C1 Refereed article in a scholarly journalUsage metrics
Categories
No categories selectedKeywords
Atom probe tomographyChemistryChemistry, PhysicalCONDUCTIVITYCryo-FIBCryogenic depositionELECTRON-BEAMFABRICATIONFocused ion beamGLANCING ANGLE DEPOSITIONMaterials ScienceMaterials Science, Coatings & FilmsPhysical SciencesPhysicsPhysics, AppliedPhysics, Condensed MatterScience & TechnologyTechnologyTHIN-FILMSTip geometryTOMOGRAPHY
Licence
Exports
RefWorks
BibTeX
Ref. manager
Endnote
DataCite
NLM
DC